Generation of component level fault models for MEMS

Component level (nodal) simulations have been proposed to both implement closed loop simulation of complete microsystems to support the migration to shorter design cycles and implement fault models of micromechanical components. Within such a simulation environment, library cells in the form of behavioural models are used for the basic components of microelectromechanical (MEM) transducers, such as beams, plates, comb-drives and membranes. This paper presents both methodologies to generate the model parameters required for the implementation of accurate component fault models and simulation results from representative defective structures in a MEMS product.