Impact of technology scaling on thermal behavior of leakage current in sub-quarter micron MOSFETs: perspective of low temperature current testing

The increase in the off-state current for sub-quarter micron CMOS technologies is making conventional I_DDQ testing ineffective. Since natural process variation together with low-V_TH devices can significantly increase the absolute leakage value and the variation, choosing a single threshold for I_DDQ testing is impractical. One of the potential solutions is the cooling of the chip during current testing. In this paper we analyze the impact of CMOS technology scaling on the thermal behavior of different leakage current mechanisms in n-MOSFETs and estimate the effectiveness of low temperature I_DDQ testing. We found that the conventional single threshold low temperature I_DDQ testing is not effective for sub-quarter micron CMOS technologies and propose the low temperature ΔI_DDQ test method. The difference between pass and fail current limits was estimated more than 200× for 0.13-μm CMOS technology.