| 伺服图形预刻机亚微米光斑曝光技术 |
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| 引用本文： | 贾连兴,张江陵. 伺服图形预刻机亚微米光斑曝光技术[J]. 应用激光, 1995, 0(2) |
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| 作者姓名： | 贾连兴 张江陵 |
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| 作者单位： | 华中理工大学计算机系 |
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| 摘 要： | 本文讨论利用激光器产生亚微米光斑、在涂有光刻胶的磁盘上曝光的有关技术．给出了伺服图形预（光）刻机的系统结构、光路及刻录头设计，提出了伺服图形微斑记录曝光模型．
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| 关 键 词： | 预（光）刻机，曝光模型，微斑记录，激光 |
The Explosure Technique or a Sub-micron Spot at a Servopattern Pre-photoetching Device |
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| Jia Lianxing,Zhang Jiangling. The Explosure Technique or a Sub-micron Spot at a Servopattern Pre-photoetching Device[J]. Applied Laser, 1995, 0(2) |
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| Authors: | Jia Lianxing Zhang Jiangling |
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| Abstract: | The paper mainly describes the related techniques that are to produce a sub-micron spot by laser and to explosure on a disk coated with photoresist. It has given the abbreviate structure of the servo-pattern pre-photoetching device,light path and the recording head. And it has proposed the explosure model for the servo-pattern pre-photoetching device. |
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| Keywords: | Pre-photoetching device explosure model microspot recording laser |
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