Automated Hybridization of X-ray Absorber Elements A Path to Large Format Microcalorimeter Arrays |
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| Authors: | Samuel J. Moseley Christine A. Allen Nicholas Costin Richard Kelley Caroline Kilbourne Timothy Miller |
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| Affiliation: | (1) NASA Goddard Space Flight Center Code 553, 8800 Greenbelt Rd., Greenbelt, MD 207721, USA;(2) MEI Technologies, Inc., 7404 Executive Place, Suite 500 Seabrook, Seabrook, MD 20706, USA |
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| Abstract: | We have developed an automated die-scale process for the attachment of X-ray absorbers onto microcalorimeters. Here, we describe the process for the production of absorber tiles on a handle wafer, their attachment to the microcalorimeter, and the removal of the supporting handle wafer. The process is shown to be a robust path to large format arrays of microcalorimeters. |
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| Keywords: | X-ray absorbers Mercury telluride SU-8 Automated tile application Adhesive attachment XeF2 etching |
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