| NbN/TaN纳米多层膜的微结构及超高硬度效应 |
| |
| 引用本文： | 许俊华,李戈扬,顾明元.NbN/TaN纳米多层膜的微结构及超高硬度效应[J].无机材料学报,2000,15(3):561-564. |
| |
| 作者姓名： | 许俊华 李戈扬 顾明元 |
| |
| 作者单位： | 上海交通大学金属基复合材料国家重点实验室; 上海 200030 |
| |
| 摘 要： | 用磁控反应溅射的方法在不锈钢基片上制备了NbN／TaN纳米多层薄膜，试验采用X射线衍射仪（XRD）、透射电子显微镜（TEM）及显微硬度仪对薄膜的微结构和硬度进行分析，结果表明：在NbN／TaN多层膜中，NbN层为面心晶体结构，TaN层为六方晶体结构；NbN／TaN纳米多层膜存在超硬效应，在调制周期2．3～170nm这一放宽的范围内保持超高硬度，硬度最大值HK达51.0GPa
|
| 关 键 词： | NbN／TaN纳米多层膜 微结构 超硬效应 |
| 收稿时间： | 1999-5-7 |
| 修稿时间： | : |
Microstructures and Superhardness Effects of NbN/TaN Nano-multilayer Films |
| |
| XU Jun-Hua,LI Ge-Yang,GU Ming-Yuan.Microstructures and Superhardness Effects of NbN/TaN Nano-multilayer Films[J].Journal of Inorganic Materials,2000,15(3):561-564. |
| |
| Authors: | XU Jun-Hua LI Ge-Yang GU Ming-Yuan |
| |
| Affiliation: | State Key Lab of MMCs; Shanghai JiaD-Tong University Shanghai 200030; China |
| |
| Abstract: | The polycrystalline NbN/TaN nano-multilayer films were grown on the substrates of stainless steel by reactive magnetron sputtering. The microstructures and microhardness of the nano-multilayer films were studied by X-ray diffraction (XRD), transmission electron microscopy (TEM) and microhardness tester. The results show that the NbN layers are cubic crystal structure and TaN layers are hexagonal in the NbN/TaN multilayer films. NbN/TaN nano-multilayer films have superhardness effects with a modulation period from 2.3nm to 17.0nm. The maximum hardness HK is 51.0GPa. |
| |
| Keywords: | NbN/TaN nano-multilayer films microstructures superhardness effects |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
| 点击此处可从《无机材料学报》浏览原始摘要信息 |
|
点击此处可从《无机材料学报》下载全文 |
