Young's modulus determination of low-k porous films by wide-band DCC/LD LSAW |
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| Authors: | Bai Maosen Fu Xing Dante Dorantes Jin Baoyin Hu Xiaotang |
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| Affiliation: | State Key Laboratory of Precision Measuring Technology and Instruments, School of Precision Instrument and Opto-Electronics Engineering, Tianjin University, Tianjin 300072, China |
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| Abstract: | Low-k interconnection is one of the key concepts in the development of high-speed ultra-large-scale integrated(ULSI) circuits.To determine the Young's modulus of ultra thin,low hardness and fragile low-k porous films more accurately,a wideband differential confocal configured laser detected and laser-generated surface acoustic wave(DCC/LD LSAW) detection system is developed.Based on the light deflection sensitivity detection principle, with a novel differential confocal configuration,this DCC/LD LSAW system... |
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| Keywords: | nano-porous low-k film surface acoustic wave differential confocal Young's modulus dispersion curve wide band |
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