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SOI-based radial-contour-mode micromechanical disk resonator |
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| Authors: | Jia Yingqian Zhao Zhengping Yang Yongjun Hu Xiaodong Li Qian School of Information Engineering Hebei University of Technology Tianjin China China Electronics Technology Group Corporation Beijing China The th Research Institute China Electronics Technology Group Corporation Shijiazhuang China |
| Affiliation: | Jia Yingqian~(1,3, ),Zhao Zhengping~(1,2),Yang Yongjun~3,Hu Xiaodong~3,and Li Qian~3 1 School of Information Engineering,Hebei University of Technology,Tianjin 300130,China 2 China Electronics Technology Group Corporation,Beijing 100846,China 3 The 13th Research Institute,China Electronics Technology Group Corporation,Shijiazhuang 050051,China |
| Abstract: | |
| Keywords: | RF-MEMS micromechanical disk resonator SOI thermo-compression bonding |
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