Affiliation: | 1. Laboratory of Nano-Fabrication and Novel Devices Integrated Technology, Institute of Microelectronics,Chinese Academy of Sciences, Beij ing 100029, China;Grace Semiconductor Manufacturing Corporation, Shanghai 201203, China 2. Laboratory of Nano-Fabrication and Novel Devices Integrated Technology, Institute of Microelectronics,Chinese Academy of Sciences, Beij ing 100029, China;Grace Semiconductor Manufacturing Corporation, Shanghai 201203, C 3. Laboratory of Nano-Fabrication and Novel Devices Integrated Technology, Institute of Microelectronics,Chinese Academy of Sciences, Beij ing 100029, China 4. Grace Semiconductor Manufacturing Corporation, Shanghai 201203, China |