| RF MEMS开关的发展现状 |
| |
| 引用本文： | 严春早,许高斌,叶刘晓. RF MEMS开关的发展现状[J]. 微纳电子技术, 2008, 45(11) |
| |
| 作者姓名： | 严春早 许高斌 叶刘晓 |
| |
| 作者单位： | 合肥工业大学,应用物理系,合肥,230009 |
| |
| 基金项目： | 安徽省高校自然科学重点科研计划项目 |
| |
| 摘 要： | RF MEMS开关是其各种组件、系统级应用中最基本的器件之一,具有低损耗、低功耗、线性化好、尺寸小及易集成等特点。对各种开关驱动机制的特点进行了比较,指出具体驱动机制的选取应符合实际应用的需求;在和传统pin开关、FET开关相比较的基础上,总结了RF MEMS开关的优缺点,概述了其目前的应用领域以及面临的主要问题;最后介绍了目前国内外RFMEMS开关研究状况。通过对国内外一些经典RF MEMS开关范例的简述,展望了RFMEMS开关未来的发展趋势。
|
| 关 键 词： | 射频微机电系统 开关 驱动机制 可靠性 发展趋势 |
Development Status of RF MEMS Switches |
| |
| Yan Chunzao,Xu Gaobin,Ye Liuxiao. Development Status of RF MEMS Switches[J]. Micronanoelectronic Technology, 2008, 45(11) |
| |
| Authors: | Yan Chunzao Xu Gaobin Ye Liuxiao |
| |
| Affiliation: | Yan Chunzao,Xu Gaobin,Ye Liuxiao(Department of Applied Physics,Hefei University of Technology,Hefei 230009,China) |
| |
| Abstract: | The RF MEMS switch is one of the basic instruments in the module and system applications of RF MEMS,and has advantages including low loss,low power,excellent linearity,small size,easy integration.By comparing the features of all the driving mechanisms,the conclusion is obtained that the choice of the specific driving mechanism must meet the requirements of the practical application.Compared with the traditional pin and FET switches,the RF MEMS switch also has advantages and disadvantages.The recent applicat... |
| |
| Keywords: | RF MEMS switch driving mechanism reliability development trend |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
