Two-chamber integrated multichannel narrowband filter prepared by a multistep etching method |
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Authors: | Jiao Hongfei Wu Yonggang Tian Guoxun Wang Shaowei Cao Hong Zhang Li Fu Lianxiao |
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Affiliation: | Institute of Precise Optical Engineering and Technology, Tongji University, Shanghai 200092, China. |
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Abstract: | A new, to the best of our knowledge, method, which combines the multistep ion-etching method with a traditional narrowband filter coating technique, is developed to prepare a two-chamber integrated multichannel filter. The influence of film deposition and etch technique on the shape and height of the narrow transmittance peaks is analyzed. A 32-channel narrowband integrated filter is fabricated with a homemade ion-etching machine and a coating machine. Every channel is distinctly separated and the FWHM is 1% of its central wavelength. The feasibility of the technique will be useful in the fabrication of a higher integrated multichannel narrowband filter. |
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