| 单片集成GaAs PIN/PHEMT光接收机前端工艺研究 |
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| 引用本文： | 冯忠,焦世龙,冯欧,杨立杰,蒋幼泉,陈堂胜,陈辰,叶玉堂.单片集成GaAs PIN/PHEMT光接收机前端工艺研究[J].固体电子学研究与进展,2008,28(4). |
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| 作者姓名： | 冯忠 焦世龙 冯欧 杨立杰 蒋幼泉 陈堂胜 陈辰 叶玉堂 |
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| 作者单位： | 南京电子器件研究所,南京,210016;南京电子器件研究所,南京,210016;电子科技大学光电信息学院,成都,610054;南京电子器件研究所,南京,210016;单片集成电路与模块国家级重点实验室,南京,210016;电子科技大学光电信息学院,成都,610054 |
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| 基金项目： | 国家自然科学基金
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国家级重点实验室基金
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| 摘 要： | 利用0.5μm GaAs PHEMT技术研究了适用于单片集成GaAs PIN/PHEMT光接收机前端的关键工艺,解决了台面工艺和PHEMT平面工艺的兼容性问题,包括不同浓度磷酸系腐蚀液对台面腐蚀均匀性的影响、台面与平面共有金属化工艺对光刻技术的要求。结果表明,工艺技术完全满足单片设计要求,研制得到的单片集成光接收机前端在输入1Gb/s和2.5Gb/s非归零(NRZ)伪随机二进制序列(PRBS)调制的光信号下得到较为清晰的输出眼图。
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| 关 键 词： | 单片集成 光探测器 分布放大器 光接收机 眼图 |
Process Research of GaAs PIN/PHEMT Monolithic Integrated Optical Receiver Front End |
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| FENG Zhong,JIAO Shilong,FENG Ou,YANG Lijie,JIANG Youquan,CHEN Tangsheng,CHEN Chen,YE Yutang.Process Research of GaAs PIN/PHEMT Monolithic Integrated Optical Receiver Front End[J].Research & Progress of Solid State Electronics,2008,28(4). |
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| Authors: | FENG Zhong JIAO Shilong FENG Ou YANG Lijie JIANG Youquan CHEN Tangsheng CHEN Chen YE Yutang |
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| Affiliation: | FENG Zhong1 JIAO Shilong1,2 FENG Ou1 YANG Lijie1 JIANG Youquan1 CHEN Tangsheng1,3 CHEN Chen1,3 YE Yutang2 (1Nanjing Electronic Devices Institute,Nanjing,210016,CHN) (2School of Optoelectronic Information,University of Electronic Science , Technology of China,Chengdu,610054,CHN) (3National Key Laboratory of Monolithic Integrated Circuits , Modules,CHN) |
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| Abstract: | The key processes for monolithic integrated optical receiver front end have been developed based on the 0.5 μm GaAs PHEMT technology of Nanjing Electronic Devices Institute. The compatibility of mesa process and PHEMT planar process is solved for mesa corrosion non-uniformity caused by H3PO4 solutions with different concentrations and the photolithography technology of mesa & planar common metallization process. Results show that the processes can fully meet the needs of monolithic design,and the developed monolithic integrated optical receiver front end has relatively clear output eye diagrams for 1 Gb/s and 2.5 Gb/s NRZ pseudorandom binary sequences(PRBS)optical signal. |
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| Keywords: | monolithic integration photodetector distributed amplifier optical receiver eye diagram |
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