| 基于IC互连线开路故障的Y/R模型 |
| |
| 引用本文： | 赵天绪,郝跃,马佩军. 基于IC互连线开路故障的Y/R模型[J]. 电子学报, 2002, 30(11): 1707-1710 |
| |
| 作者姓名： | 赵天绪 郝跃 马佩军 |
| |
| 作者单位： | 1. 西安电子科技大学微电子所,陕西西安 710071;2. 宝鸡文理学院数学系,陕西宝鸡 721007 |
| |
| 基金项目： | 国家科技攻关项目 (No .96 738 0 1 0 3 1 0 ) |
| |
| 摘 要： | 在半导体制造业中,IC的成品率和可靠性(Y/R)是倍受关注的两个问题.研究表明它们之间存在着显著的相关性.为了表征这种相关性,本文从缺陷造成互连线开路的机理出发,分析了成品率关键面积和可靠性关键面积,提出了IC成品率与可靠性关系模型.通过模拟实验给出了该模型的有效性验证.
|
| 关 键 词： | 成品率 可靠性 关键面积 |
| 文章编号： | 0372-2112(2002)11-1707-04 |
| 收稿时间： | 2001-11-26 |
Y/R Model of Integrated Circuits Based on the Open Circuit Fault of Interconnections |
| |
| ZHAO Tian xu ,,HAO Yue ,MA Pei jun. Y/R Model of Integrated Circuits Based on the Open Circuit Fault of Interconnections[J]. Acta Electronica Sinica, 2002, 30(11): 1707-1710 |
| |
| Authors: | ZHAO Tian xu HAO Yue MA Pei jun |
| |
| Affiliation: | 1. Microelectronics Institute of Xidian University Xi'an,Shaanxi 710071,China;2. Department of mathematics of Baoji college of Arts and science,Baoji,Shaanxi 721007,China |
| |
| Abstract: | Yield and reliability are two problems that are focused on semiconductor manufacturing.The researched results show that there exists a relation between yield and reliability of IC's.In order to describe this correlativity,the yield critical area and the reliability critical area are analyzed based on the mechanism of open circuit of interconnections caused by manufacturing defects,and the model of relation between IC's yield and reliability is presented in this paper.Finally,the validity of this model is shown by computer simulation. |
| |
| Keywords: | yield reliability critical area |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
| 点击此处可从《电子学报》浏览原始摘要信息 |
|
点击此处可从《电子学报》下载免费的PDF全文 |
