| 压电驱动微型喷雾器的研究 |
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| 引用本文： | 刘长庚,周兆英,王晓浩,叶雄英. 压电驱动微型喷雾器的研究[J]. 压电与声光, 2001, 23(4): 272-274 |
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| 作者姓名： | 刘长庚 周兆英 王晓浩 叶雄英 |
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| 作者单位： | 清华大学精密仪器及机械学系微机械研究室 |
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| 基金项目： | 国家"九七三”基础研究项目(G1999033106);国家自然科学重点基金资助项目(29833070) |
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| 摘 要： | 研究开发了一种压电驱动微型喷雾器。利用微机械加工技术,制作微米级的喷孔阵列,基于喷墨打印机原理,微喷换能器采用压电驱动方式在其较高阶谐振状态下工作。实验分析了这种微喷换能器的阻抗特性、谐振状态下振动特性以及微型喷雾器的工作性能。实验结果表明,这种喷雾器喷出的雾滴直径大小集中,工作稳定且容易控制喷雾量。
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| 关 键 词： | 压电驱动 微加工技术 工作原理 喷雾器 |
| 文章编号： | 1004-2474(2001)04-0272-03 |
| 修稿时间： | 2001-03-04 |
The Characteristics of a Piezoelectrically Actuated Micro Jet |
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| LIU Chang-geng,ZHOU Zhao-ying,WANG Xiao-hao,YE Xiong-ying. The Characteristics of a Piezoelectrically Actuated Micro Jet[J]. Piezoelectrics & Acoustooptics, 2001, 23(4): 272-274 |
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| Authors: | LIU Chang-geng ZHOU Zhao-ying WANG Xiao-hao YE Xiong-ying |
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| Abstract: | A piezoelectrically actuated micro jet based upon drop-on-demand ink jet principle has been developed.By using MEMS techniques.Nozzle array with the diameter of several microns is fabricated for aerosol administration.Pressure wave generated by the piezoelectric actuator after an electrical pulse,squeezes the liquid out from the small nozzles,forming droplets for use in inhalation drug therapy.The micro jet can work steadily.By modulating of nozzle diameter,this type of micro jets can be widely used in biochemical analysis,drug administration and jet propulsion.The characteristics of the micro jet has been thoroughly studied.Both theoretic analysis and experimental studies have been performed. |
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| Keywords: | micro jet piezoelectric actuator MEMS |
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