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| 溶胶凝胶法制备ZnO:Ga作为电流扩散层的LED光电性能研究 | |
| 引用本文： | 李倩,王万晶,李喜峰,张建华,吕建国. 溶胶凝胶法制备ZnO:Ga作为电流扩散层的LED光电性能研究[J]. 功能材料与器件学报, 2012, 18(3): 238-242 |
| 作者姓名： | 李倩 王万晶 李喜峰 张建华 吕建国 |
| 作者单位： | 1. 上海大学新型显示技术及应用集成教育部重点实验室上海200072;上海大学材料科学与工程学院上海200072 2. 上海大学新型显示技术及应用集成教育部重点实验室上海200072 3. 上海大学新型显示技术及应用集成教育部重点实验室上海200072;浙江大学硅材料国家重点实验室杭州310027 4. 浙江大学硅材料国家重点实验室杭州310027 |
| 基金项目： | 国家自然科学基金委的项目资助，上海市科委高新技术重大专项基金，浙江大学硅材料国家重点实验室开放基金 |
| 摘 要： | 采用溶胶凝胶法制备了ZnO:Ga(GZO)透明导电薄膜,并用做GaN基LED的电流扩散层。研究表明,GZO薄膜为多晶薄膜,透光率大于80%,粗糙度为Ra 4.6nm,制备的LED的开启电压为2.4V,并成功的点亮LED芯片。 |
| 关 键 词： | 溶胶凝胶 LED GZO |
Optical and Electrical Properties of the LED Using ZnO:Ga Film as Current Diffusion Layer by Sol-gel Technique |
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| LI Qian , WANG Wang-jing , LI Xi-Feng , ZHANG Jian-hua , LV Jian-guo. Optical and Electrical Properties of the LED Using ZnO:Ga Film as Current Diffusion Layer by Sol-gel Technique[J]. Journal of Functional Materials and Devices, 2012, 18(3): 238-242 | |
| Authors: | LI Qian WANG Wang-jing LI Xi-Feng ZHANG Jian-hua LV Jian-guo |
| Affiliation: | 1.Key Laboratory of Advanced Display and System Applications of Ministry of Education, Shanghai University,Shanghai,200072 China; 2.School of Materials Science and Engineering,Shanghai University,Shanghai,200072 China; 3.State Key Laboratory of Silicon Materials,Department of Materials Science and Engineering, Zhejiang University,Hangzhou 310027,China) |
| Abstract: | The transparent conduct oxide film-ZnO:Ga thin film was fabricated by sol-gel technique and was used as current diffusion layer in the GaN-based LED.It was found that the GZO thin film has a poly-crystalline structure.The transmittance property of the GZO film coated on the glass is over 80% and the roughness is Ra 4.6nm.A turn-on voltage of 2.4V and blue light were successfully observed in the LED using the GZO as current diffusion layer by sol-gel technique.It is believed that sol-gel technique is a promising method to fabricate the current diffusion layer instead of traditional methods. |
| Keywords: | Sol-gel technique LED GZO |
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