| 辅助电极型硅传感器的研究进展 |
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| 引用本文： | 王青松. 辅助电极型硅传感器的研究进展[J]. 传感器与微系统, 2002, 21(6): 1-3,7 |
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| 作者姓名： | 王青松 |
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| 作者单位： | 北京科技大学,材料科学与工程学院,北京,100083 |
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| 基金项目： | 国家自然科学基金项目部分资助 (5 98740 16) |
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| 摘 要： | 综述了 1986年以来辅助电极型硅传感器的开发研制与应用情况 ,包括辅助电极材料的选择及其优缺点 ,提出了对辅助电极材料的改进意见 ,认为今后开展辅助电极与被测熔体中元素 (如碳 )间化学反应的基础理论研究 ,特别是被测熔体氧对测量结果影响的研究 ,对辅助电极型硅传感器的开发研制和应用具有重要的理论意义和经济价值。
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| 关 键 词： | 硅传感器 辅助电极 研究进展 |
| 文章编号： | 1000-9787(2002)06-0001-03 |
Researching progress on auxiliary electrode silicon sensor |
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| WANG Qing song. Researching progress on auxiliary electrode silicon sensor[J]. Transducer and Microsystem Technology, 2002, 21(6): 1-3,7 |
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| Authors: | WANG Qing song |
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| Abstract: | The research development and application on auxiliary electrode silicon sensor from 1986 were summarized.These include selection of material of auxiliary electrode, and their merits and demerits.The improvement of auxiliary electrode material was point out.It have important theory and practice meaning for the development and application of auxiliary electrode silicon sensor to study on chemical reaction between auxiliary electrode and element,for instance carbon,in melt,especially on the affection of measured melt to measuring result. |
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| Keywords: | silicon sensor auxiliary electrode researching progress |
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