sol-gel法制备氧化锌铝陶瓷靶材及其性能研究

为提高常压烧结法制备的掺铝氧化锌(AZO)靶材性能,以sol-gel法制备的Al-ZnO复合纳米粉末为原料,对制备工艺参数进行了优化.结果表明:湿法球磨对生坯的密度均匀性有利;随成型压力提高靶材致密度先升后降,电阻率呈相反趋势;增加烧结保温时间,晶粒尺寸变大,致密度与电阻率改善不明显;采用2 MPa成型压力,在1 25...

Study on preparation and properties of zinc aluminum oxide ceramic targets prepared by sol-gel method

To increase the properties of AZO targets fabricated by normal pressure sintering method,using the sol-gel method prepared Al-ZnO(AZO) nanocomposite powders as raw material,the preparing process parameters were optimized.The results indicate that the wet milling is benefit to the green density uniformity;with the increase of forming pressure,the density of target first increases and then decreases,but the resistivity has the reverse trend;increasing the sintering holding time,the grain size increases,however,the improvements of density and resistivity are not obvious.Using 2 MPa forming pressure,sintering at 1 250 ℃ for 1.0 h,the density of zinc oxide target doped with w(Al)=2% is up to 99.2%,and the resistivity is about 2×10-2 Ω?cm.