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脉冲电泳沉积制备电致变色WO3薄膜
引用本文:蓝满玉,王晨,汪炜. 脉冲电泳沉积制备电致变色WO3薄膜[J]. 电子元件与材料, 2011, 30(2): 43-46,49
作者姓名:蓝满玉  王晨  汪炜
作者单位:蓝满玉,LAN Manyu(福州大学,材料科学与工程学院,福建,福州,350108);王晨,WANG Chen(福州大学,材料科学与工程学院,福建,福州,350108;福州大学,表面纳米技术研究所,福建,福州,350108);汪炜,WANG Wei(福州大学,表面纳米技术研究所,福建,福州,350108)
基金项目:福建省自然科学基金资助项目
摘    要:采用正交设计法优化了脉冲电泳沉积制备WO3薄膜的工艺参数,并通过分析薄膜的微观结构、透射光谱和循环伏安曲线等研究了最佳工艺条件下制备的WO3薄膜的电致变色性能.结果表明,脉冲电泳沉积制备WO3薄膜的最佳工艺参数为平均电流密度0.2×10-3A/cm2,沉积时间6 min,占空比75%,脉冲周期10 ms.最佳工艺条件下...

关 键 词:脉冲电泳沉积  WO3薄膜  电致变色  正交设计

Preparation of electrochromic WO_3 films by pulsed electrophoretic deposition
LAN Manyu,WANG Chen,WANG Wei. Preparation of electrochromic WO_3 films by pulsed electrophoretic deposition[J]. Electronic Components & Materials, 2011, 30(2): 43-46,49
Authors:LAN Manyu  WANG Chen  WANG Wei
Affiliation:LAN Manyu1,WANG Chen1,2,WANG Wei2 (1.College of Materials Science and Engineering,Fuzhou University,Fuzhou 350108,China,2.Institute of Surface Nanotechnology,China)
Abstract:The process parameters employed for the pulsed electrophoretic deposition of WO3 films were optimized by the orthogonal design method.The electrochromic properties of the WO3 films prepared under the optimized condition were studied through characterizing the microstructure,transmission spectra and cyclic voltammogram of the films.The optimal process parameters for the pulsed electrophoretic deposition of WO3 films are:average current density=0.2×10-3 A/cm2,deposition time=6 min,duty cycle=75% and pulse period=10 ms.For the WO3 films prepared under the optimized condition,they are amorphous film with a thickness of about 251 nm,their transmission modulation (?T) reaches 76%~80% in the visible region (550~800 nm),and they exhibit high electrochemical activity with an ion storage capacity of 27.8×10-3 C/cm2;However,their bleaching/coloring responses are asymmetric and reversibility is relatively low (75.1%).
Keywords:pulse electrophoretic deposition  WO3 film  electrochromism  orthogonal design  
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