高稳定薄膜电阻技术及其应用

首先对有关薄膜电阻的理论作了一定的探讨,得出薄膜电阻随电阻率的增加,其温度系数将会减小;在一定厚度范围内薄膜厚度减小,其温度系数减小;适当的成膜工艺能控制和改善电阻的温度系数的结论。给出了制备薄膜电阻的试验方法(调整薄膜的淀积条件以获得高质量的薄膜,再通过热处理激活)及试验结果,对影响电阻特性及稳定性的一些条件进行了讨论,并探讨了高稳定薄膜电阻技术在集成电路中的应用前景。该工艺现已在双极和MOS电路中得到了很好的应用,拥有更快、更好的发展前景。

High Stability of the Thin Film Resistor Teohnology and its Applications

This article on the resistance of the thin film of a certain theory,the thin film resistors come with the increase in the rate of resistance,which will reduce the temperature coefficient;a certain range of thickness of the film thickness decreases,the temperature coefficient decreases;as appropriate Membrane technology to control and improve the temperature coefficient of resistance conclusion.Preparation gives the film the resistance test method(to adjust the film deposition conditions in order to obtain high-quality films,and then activated by heat treatment) and the results of tests on the impact resistance characteristics and stability of a number of conditions were discussed and explored the high-Stability of the film resistor technology in the integrated circuit in the application:the technology is now in the bipolar and MOS circuit has been very good applications,with faster and better development prospects.