A novel approach to assess the mechanical reliability of thin,ceramic-based multilayer architectures |
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| Affiliation: | 1. Department of Materials Science, Montanuniversitaet Leoben, Franz Josef Straße 18, A-8700 Leoben, Austria;2. Materials Center Leoben Forschung GmbH, Roseggerstrasse 12, A-8700 Leoben, Austria;1. Institute of Physics of Materials, Czech Academy of Sciences, Žižkova 513/22, 616 62 Brno, Czech Republic;2. Research Centre UNIZA, University of Žilina, Univerzitná 8215/1, 010 08 Žilina, Slovakia;3. Institute of Rock Structure and Mechanics, Czech Academy of Sciences, V Holešovičkách 41, 180 00 Prague, Czech Republic;4. Institute of Macromolecular Chemistry, Czech Academy of Sciences, Heyrovského nám. 2, 162 06 Prague, Czech Republic;1. Institute of Physics of Materials, Czech Academy of Sciences, Žižkova 22, 616 62 Brno, Czech Republic;2. CEITEC IPM, Institute of Physics of Materials, Czech Academy of Sciences, Žižkova 22, 616 62 Brno, Czech Republic;3. Institute of Materials Science and Engineering, Brno University of Technology, Technická 2, 616 69 Brno, Czech Republic;4. CEITEC BUT, Brno University of Technology, Brno, Purkyňova 123, Brno 612 00, Czech Republic;1. Slovak University of Technology, Faculty of Chemical and Food Technology, Department of Inorganic Materials, Radlinského 9, 812 37 Bratislava, Slovakia;2. Comenius University, Faculty of Natural Sciences, Department of Physical and Theoretical Chemistry, Mlynská dolina CH1, 842 15 Bratislava, Slovakia;3. Slovak University of Technology, Faculty of Chemical and Food Technology, Department of Plastics, Rubber and Fibres, Radlinského 9, 812 37 Bratislava, Slovakia;4. Slovak University of Technology, Faculty of Mechanical Engineering, Institute of Process Engineering, Námestie Slobody 17, 812 31 Bratislava, Slovakia;1. Jozef Stefan Institute, Jamova 39, Ljubljana, Slovenia;2. VALL-CER d.o.o., Ljubljana, Slovenia;1. Institute of Materials Research, Slovak Academy of Sciences, Watsonova 47, 04353, Košice, Slovak Republic;2. Department of Mathematics, Faculty of Chemical and Food Technology, Slovak Technical University, Radlinského 9, 812 37, Bratislava, Slovak Republic;3. Institute of Inorganic Chemistry, Slovak Academy of Sciences, Dúbravská cesta 9, 845 36, Bratislava, Slovak Republic;4. Centre of Excellence for Advanced Materials Application, Slovak Academy of Sciences, Dúbravská cesta 9, 845 11, Bratislava, Slovak Republic;5. Donát Bánki Faculty of Mechanical and Safety Engineering, Óbuda University, Népszínház utca 8, 1081, Budapest, Hungary |
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| Abstract: | Many substrates for microelectronic systems contain ceramic/glass layers and metal features (e.g. electrodes, vias, metal pads) built up in a complex 3D architecture. The combination of different materials with distinct thermo-elastic properties may yield significant (local) internal stresses, which are to be superimposed to external thermo-mechanical loads in service. Due to the various material junctions, interfaces, etc, failure of these multilayer systems can hardly be predicted. In this work, a strategy is proposed to quantify the effect of architecture and loading conditions on the mechanical reliability of ceramic-based substrates. Model ceramic structures containing important design features (e.g. inner electrode, via, top metallization) were fabricated and tested in different environments (i.e. humid or dry conditions) under uniaxial as well as biaxial bending. Significant difference in the characteristic strength between ∼260 MPa and ∼620 MPa were measured, associated with the particular architectural feature, type of loading, and/or environment. |
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| Keywords: | Thin substrates Multilayer Metallization Strength distribution Fractography |
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