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Packaging effects on the sensing performance of RTDs on an AlN substrate of a wafer heater |
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| Authors: | Effendi Nico Setiawan Kim Kyoung Joon |
| Affiliation: | 1.Dept. of Mechanical Design Engineering, Pukyong National University, Busan, 48547, Korea ; |
| Abstract: | Journal of Mechanical Science and Technology - This study investigates packaging effects on the sensing performance of resistance temperature detectors (RTDs) on an AlN substrate of a wafer heater.... |
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