| 石英晶体监控法镀制高精度光学薄膜 |
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| 引用本文： | 严晖,胡焕林,孙嵩泉,李万福.石英晶体监控法镀制高精度光学薄膜[J].真空,2003(5):16-18. |
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| 作者姓名： | 严晖 胡焕林 孙嵩泉 李万福 |
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| 作者单位： | 1. 合肥工业大学,机械与汽车工程学院,安徽,合肥,230009
2. 普乐(合肥)光技术有限公司,安徽,合肥,230088 |
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| 摘 要： | 讨论了石英晶体监控法在光学薄膜镀制过程中的应用原理。通过与常规的光学监控法镀制的膜层相比较．证实了石英晶体监控法有助于提高光学薄膜的光学品质。试验表明所镀膜层的光学性能优异，在光通信和激光器等领域具有广阔的应用前景。
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| 关 键 词： | 石英晶体监控法 光学薄膜 镀膜 光学性能 原理 振荡 相位 沉积 |
| 文章编号： | 1002-0322(2003)05-0016-03 |
| 修稿时间： | 2003年6月15日 |
Preparation of high precise optical coating by quartz crystal deposition monitor |
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| YAN Hui,HU Huan-lin,SUN Song-quan,LI Wan-fu.Preparation of high precise optical coating by quartz crystal deposition monitor[J].Vacuum,2003(5):16-18. |
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| Authors: | YAN Hui HU Huan-lin SUN Song-quan LI Wan-fu |
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| Affiliation: | YAN Hui~1,HU Huan-lin~1,SUN Song-quan~2,LI Wan-fu~2 |
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| Abstract: | The principle of the quartz crystal deposition monitor technology in the optical film deposition process is discussed. Compared with the conventional optical deposition monitor coating, the quartz crystal deposition monitor technology is particularly helpful for the optical quality of the optical film. A series of measurements suggest that the optical performance have been drastically improved and will be widely used in the optical communication and the laser industries, and so on. |
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| Keywords: | quartz crystal deposition monitor technology optical film Thermal vapor deposition coating |
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