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LICVD制备纳米SiO2粉末工艺研究
引用本文:王智 吴重庆. LICVD制备纳米SiO2粉末工艺研究[J]. 激光杂志, 1998, 19(2): 22-26
作者姓名:王智 吴重庆
作者单位:北方交通大学光波技术研究所
摘    要:对LICVD制备纳米SiO2粉末工艺了理论分析,探索了工艺参数与粒子特征的关系,并且利用正安装置成功地制备纳米SiO2粉末。

关 键 词:LICVD工艺 红外吸收 二氧化硅 粉末工艺

Study on the preparation techniques of nanometre sized SiO 2 powder through laser induced chemical vapor deposition method
Wang Zhi Wu Chongqing Jian Shuisheng. Study on the preparation techniques of nanometre sized SiO 2 powder through laser induced chemical vapor deposition method[J]. Laser Journal, 1998, 19(2): 22-26
Authors:Wang Zhi Wu Chongqing Jian Shuisheng
Abstract:The preparation technique of nanometre sized SiO 2 powder through LICVD method is studied theoretically.The relation of the technique parameters and the characteristics of the nanometre sized SiO 2 powder is discussed.The nanometre sized SiO 2 powder is gained successfully.
Keywords:LICVD method  nanometre sizd SiO 2 powder  infrared absorption  
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