电子束蒸发法制备MoO3薄膜及其性质研究

采用电子束蒸发法在玻璃衬底上制备MoO3薄膜.X射线衍射谱表明制备样品属于正交晶系,沿<010>晶向择优取向生长.随着衬底温度的升高,样品的晶粒尺寸先增大后减小,退火后又增大.此外,样品的(040)衍射峰随衬底温度升高单调向低衍射角方向移动.扫描电镜照片显示制备样品具有针状晶粒特征,退火后晶粒大小的分布趋于均匀.紫外-...

Properties of MoO3 Films Deposited by Electron Beam Evaporation

MoO3 films were deposited on glass substrates by electron beam evaporation method. X-ray diffraction patterns revealed that the prepared samples presented orthorhombic structure with preferred orientation of . As substrate temperature increased, the grain size increases firstly then decreases, but increases once more after annealing. Moreover, the diffraction peak of (040) plane shifts to lower angle monotonically with increased substrate temperature. Scanning electron microscope images show needle-like grains and their size becomes more uniform after annealing. With increased subsutrate temperature, the sample optical absorption edge in ultraviolet-visible spectra shift to longer wavelength and the transmittance also decreases. On the other hand, the optical gap reduces from 2.93 eV to 2.59 eV when substrate temperature increases from 100 ℃ to 300 ℃, and even reduces to 2.46 eV after air annealing under 500 ℃.