Interfacial Chemistry of Langmuir-Blodgett Deposited Polyimide Films on Si (100)

Using the Langmuir-Blodgett (LB) technique, ultrathin films of the octadecylammonium salt of polyamic acid (PACS) on (100) oriented silicon wafers with one, three and five monolayers were prepared. The imidization of the films was investigated with x-ray photoelectron spectroscopy (XPS) during a stepwise heating procedure in vacuum. Significant differences in the XPS spectra indicate an incomplete polymerization of the films as a function of film thickness. It is believed that the chemical interaction at the interface between Si substrate and PACS is responsible for the incomplete polymerization of the LB film in direct contact with the substrate. From ellipsometric measurements the absolute thickness of a PACS and a polyimide layer has been determined to be 1.7 nm and 0.6nm, respectively. These measurements allow us to determine the electron mean free path for the Si2p electrons (E_k=1153 eV) of λ = 4.2±0.1 nm through these films.