| 叉指微加速度计的设计与闭环检测研究 |
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| 引用本文： | 张洪震,吴学忠,肖定邦. 叉指微加速度计的设计与闭环检测研究[J]. 微计算机信息, 2007, 23(14): 214-216 |
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| 作者姓名： | 张洪震 吴学忠 肖定邦 |
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| 作者单位： | 410073,湖南,国防科技大学 |
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| 摘 要： | 设计了一种“叉指式”微机械加速度计和相应的闭环检测电路,介绍了此微加速度计的加工工艺,并使用Ansys软件进行了模态分析和机械分析,仿真结果跟理论计算相吻合。最后对该闭环微加速度计进行了测试,得到的测量线性度为2.5%,刻度因子为3V/g。
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| 关 键 词： | " 叉指式" 微加速度计 有限元分析 闭环检测 |
| 文章编号： | 1008-0570(2007)05-2-0214-03 |
| 修稿时间： | 2007-03-23 |
Design and closed-loop detection of a comb microaccelerometer |
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| ZHANG HONGZHEN,WU XUE ZHONG,XIAO DINGBANG. Design and closed-loop detection of a comb microaccelerometer[J]. Control & Automation, 2007, 23(14): 214-216 |
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| Authors: | ZHANG HONGZHEN WU XUE ZHONG XIAO DINGBANG |
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| Affiliation: | ZHANG HONGZHEN WU XUE ZHONG XIAO DINGBANG |
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| Abstract: | A kind of comb microaccelerometer and its closed-loop detection circuit are designed,processing technic of the microac-celerometer is mentioned,Modal analysis and mechanical analysis are carried out with Ansys,the simulation results match with the theoretical prediction very well.The closed-loop microaccelerometer is tested at last,and the test shows that the measuring linearity of the microaccelerometer is 2.5%,the scale factor is 3V/g. |
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| Keywords: | Comb microaccelerometer Finite element analysis(FEA) Closed-loop detection |
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