| 用有限元法对原子力显微镜力传感器结构优化的研究 |
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| 引用本文： | 王晓晔 薛实福. 用有限元法对原子力显微镜力传感器结构优化的研究[J]. 光学精密工程, 1998, 6(1): 36-41 |
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| 作者姓名： | 王晓晔 薛实福 |
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| 作者单位： | 清华大学精密仪器与机械学系 |
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| 摘 要： | 应用有限元法对原子力显微镜(AFM)力传感器进行了力学分析,并计算了它的固有频率和力弹性常数。在此基础上,对力传感器基于减小应力和应力集中的原则提出了一种优化结构,并得出了可以作为力传感器设计的依据和原则。
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| 关 键 词： | 有限元法 原子力显微镜 力传感器 |
| 收稿时间： | 1997-07-21 |
Investigation of Structural Optimization of the Force Sensor for the Atomic Force Microscope with the Finite Element Analysis |
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| WANG Xiao Ye,XUE Shi Fu,LI Qing Xian,XU Yu Xian,BAI Li Fen,YU Shui. Investigation of Structural Optimization of the Force Sensor for the Atomic Force Microscope with the Finite Element Analysis[J]. Optics and Precision Engineering, 1998, 6(1): 36-41 |
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| Authors: | WANG Xiao Ye XUE Shi Fu LI Qing Xian XU Yu Xian BAI Li Fen YU Shui |
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| Affiliation: | Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084 |
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| Abstract: | In this paper,the mechanical analysis is carried out for the force sensor in AFM with the Finite Element Analysis.The resonant frequency and force constant are also calculated.In addition,the structural optimization of the force sensor is developed.Consequently,a better structure of the cantilever with V shape based on slighter stree concentration is recommended.Some helpful principles that can be used to guide the design are presented. |
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| Keywords: | Finite Element Analysis Atomic Force Microscope Force sensor |
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