| Affiliation: | 1. Department of Mechanical Engineering, Incheon National University, Incheon, South Korea;2. Global Frontier Center for Multiscale Energy System, Seoul National University, Seoul, South Korea;3. 3D New Devices Research Section, Electronics and Telecommunications Research Institute, Daejeon, South Korea;4. Department of Mechanical and Aerospace Engineering, Seoul National University, Seoul, South Korea;5. Department of Mechanical Engineering, Ajou University, Suwon, South Korea;6. Center for BioMicrosystems, Brain Science Institute, Korea Institute of Science and Technology, Seoul, South Korea;7. Department of Chemical and Biomolecular Engineering, Seoul National University of Science & Technology, Seoul, South Korea |
