Maskless,High‐Precision,Persistent, and Extreme Wetting‐Contrast Patterning in an Environmental Scanning Electron Microscope |
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Authors: | Ville Liimatainen Ali Shah Leena‐Sisko Johansson Nikolay Houbenov Quan Zhou |
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Affiliation: | 1. Department of Electrical Engineering and Automation, School of Electrical Engineering, Aalto University, Espoo, Finland;2. Department of Micro‐ and Nanosciences, School of Electrical Engineering, Aalto University, Espoo, Finland;3. Department of Forest Products Technology, School of Chemical Technology, Aalto University, Espoo, Finland;4. Department of Applied Physics, School of Science, Aalto University, Espoo, Finland |
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