| 基于干涉条纹的激光准直仪的研究 |
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| 引用本文： | 付鲁华,林玉池,周欣,齐永岳.基于干涉条纹的激光准直仪的研究[J].传感器与微系统,2007,26(9):64-66. |
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| 作者姓名： | 付鲁华 林玉池 周欣 齐永岳 |
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| 作者单位： | 天津大学,精密测试技术与仪器国家重点实验室,天津,300072 |
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| 摘 要： | 在所研究的直线度激光测量系统中,以激光干涉光作为准直测量的基准,CCD作为光电转换元件,进行导轨直线度误差的测量与计算。通过系统的重复性实验以及与光电自准直仪的比对实验表明:测量系统的测量距离可达10m以上,可检测x轴方向上30 mm以内的位移变化量,分辩力可达0.001 mm。其性能指标基本达到了预定目标。
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| 关 键 词： | 激光准直 干涉条纹 直线度 |
| 文章编号： | 1000-9787（2007）09-0064-03 |
| 修稿时间： | 2006-12-27 |
Research on laser collimator based on interference fringe |
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| FU Lu-hua,LIN Yu-chi,ZHOU Xin,QI Yong-yue.Research on laser collimator based on interference fringe[J].Transducer and Microsystem Technology,2007,26(9):64-66. |
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| Authors: | FU Lu-hua LIN Yu-chi ZHOU Xin QI Yong-yue |
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| Abstract: | A laser collimator to measure the straightness is provided. In this straightness measurement system,the laser interference beam is used as the measuring basis,and the linear CCD is fixed on the receiving target to get the straightness error. Through the comparison tests, system stability and reiteration test of the model instrument in contrast to photo-electricity autocollimator,the results show that the measurement length is more than 10 m,the measurement range on x direction is about 30 mm and the resolution is 0. 001 mm. The performances of laser collimator can meet the scheduled goal. |
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| Keywords: | laser collimation interference fringe straightness |
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