| MEMS传感器的标准化现状与发展对策 |
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| 引用本文： | 陈勤,范树新,张维波.MEMS传感器的标准化现状与发展对策[J].传感器与微系统,2007,26(8):6-8. |
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| 作者姓名： | 陈勤 范树新 张维波 |
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| 作者单位： | 1. 信息产业部,标准化研究所,北京,100007
2. 中国电子科技集团公司,第四十九研究所,黑龙江,哈尔滨,150001 |
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| 摘 要： | 随着MEMS传感器在各个领域的广泛应用,传感器领域的标准化工作思路和技术路线发生了变化。论述了目前国内外MEMS传感器标准的现状,并就国内外MEMS传感器标准体系的发展过程、特点、标准体系存在的问题、与现有半导体标准的关系进行了分析探讨,同时,对我国MEMS传感器标准的发展对策提出了建议。
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| 关 键 词： | 微电子机械系统 传感器 标准 半导体 |
| 文章编号： | 1000-9787（2007）08-0006-03 |
| 修稿时间： | 2007-07-11 |
Status and countermeasure of MEMS sensors standardization |
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| CHEN Qin,FAN Shu-xin,ZHANG Wei-bo.Status and countermeasure of MEMS sensors standardization[J].Transducer and Microsystem Technology,2007,26(8):6-8. |
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| Authors: | CHEN Qin FAN Shu-xin ZHANG Wei-bo |
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| Affiliation: | 1. Standardization Research Institute, the Ministry of Information Industries, Beijing 100007, China; 2. The 49th Research Institute, China Electronics Technology Group Corporation, Harbin 150001, China |
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| Abstract: | With the application of MEMS sensor in a lot of fields, working theories and technique ways of standardization in sensor fields are changed. The current status of MEMS sensor standardization at home and abraod is discussed, and the development process, characteristics and existing problems of MEMS sensor system in connection with current semicondition standardization are analyzed. The proposal of MEMS sensor development is provided. |
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| Keywords: | micro electromechanical system(MEMS) sensors standardization semiconductor |
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