| 高Q值音叉式微陀螺静电自激驱动研究 |
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| 引用本文： | 王俊杰,车录锋,李玉芳,熊斌,谢铮,王跃林.高Q值音叉式微陀螺静电自激驱动研究[J].传感器与微系统,2007,26(10):38-40. |
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| 作者姓名： | 王俊杰 车录锋 李玉芳 熊斌 谢铮 王跃林 |
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| 作者单位： | 中国科学院,上海微系统与信息技术研究所,传感技术国家重点实验室,上海,200050 |
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| 摘 要： | 为了提高检测精度,对研制的具有滑膜阻尼的音叉式微机械陀螺采用静电自激驱动方式,它能够使驱动振动自动稳定在驱动模态的固有频率上,并保持恒定的驱动振动速度幅度。分析了静电自激驱动电路工作原理,采用自动增益控制(AGC)设计制作了相应的检测电路,实现了Q值为325、谐振频率为2.04 kHz微陀螺的闭环恒幅自激振动。
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| 关 键 词： | 微机械陀螺 自激驱动 自动增益控制 |
| 文章编号： | 1000-9787（2007）10-0038-03 |
| 修稿时间： | 2007-02-05 |
Study on electrostatic self-excited driving for tuning fork micromachined gyroscope with large Q value |
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| WANG Jun-jie,CHE Lu-feng,LI Yu-fang,XIONG Bin,XIE Zheng,WANG Yue-lin.Study on electrostatic self-excited driving for tuning fork micromachined gyroscope with large Q value[J].Transducer and Microsystem Technology,2007,26(10):38-40. |
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| Authors: | WANG Jun-jie CHE Lu-feng LI Yu-fang XIONG Bin XIE Zheng WANG Yue-lin |
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| Affiliation: | State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Science, Shanghai 200050, China |
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| Abstract: | In order to improve detection precision,electrostatic self-excited driving mode is presented for tuning fork micromachined gyroscope fabricated with slide-film damping,which enables driving motion to oscillate stably with natural frequency of driving mode and keep steady amplitude of driving oscillation's velocity.The principle of electrostatic self-excited driving is analyzed,related detecting circuits is designed and fabricated by automatic gain control(AGC)and closed-loop self-excited driving is performed for the gyroscope with the Q value of 325 and resonance frequency of 2.04 kHz. |
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| Keywords: | micromachined gyroscope self-excited driving automatic gain control(AGC) |
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