|
|||||
|
|
| 通用型高温压阻式压力传感器研究 | |
| 引用本文： | 王权,丁建宁,王文襄,薛伟.通用型高温压阻式压力传感器研究[J].中国机械工程,2005,16(20):1795-1798. |
| 作者姓名： | 王权 丁建宁 王文襄 薛伟 |
| 作者单位： | 1. 江苏大学,镇江,212013 2. 江苏昆山双桥传感器测试技术有限公司,苏州,215325 3. 江苏大学,镇江,212013;温州大学,温州,323035 |
| 基金项目： | 国家科技攻关项目，国家传感器技术科技攻关项目，浙江省科技攻关项目 |
| 摘 要： | 针对石油化工等领域高温下压力测量的要求,设计了压阻式压力传感器硅芯片,采用SIMOX 技术SOI晶片,在微加工平台上制作了硅芯片.对不同的用户工况设计了装配结构,采用耐高温封装工艺,研究了耐高温微型压力传感器封装材料匹配与热应力消除技术,解决了内外引线的技术难点.从低成本、易操作性出发,设计了温度系数补偿电路,研制了精度高、稳定性佳的耐高温通用压力传感器. |
| 关 键 词： | 高温压力传感器 耐高温封装 补偿电路 |
| 文章编号： | 1004-132X（2005）20-1795-04 |
| 收稿时间： | 2004-07-28 |
| 修稿时间： | 2004-07-28 |
Research on Generic High Temperature Piezoresistive Pressure Sensor |
|
| Wang Quan,Ding Jianning,Wang Wenxiang,Xue Wei.Research on Generic High Temperature Piezoresistive Pressure Sensor[J].China Mechanical Engineering,2005,16(20):1795-1798. | |
| Authors: | Wang Quan Ding Jianning Wang Wenxiang Xue Wei |
| Affiliation: | 1. Jiangsu University, Zhenjiang,212013; 2. Jiangsu Kunshan Shuangqiao Sensor Measurement Controlling Co. Ltd. , Suzhou,215325; 3. Wenzhou University, Wenzhou, 323035 |
| Abstract: | To meet the needs of pressure measurements in harsh environments such as high temperatures and aggressive media,a high temperature pressure sensor was prepared.The strain gauge chip of piezoresistive pressure sensor was designed and fabricated in the micro-machining workshop based on SIMOX technology.The TCE (thermal coefficient of expansion) mismatches among different materials within the high micro pressure sensor system were studied.The pressure sensor was fabricated successfully using high temperature packaging process.The TCS(temperature coefficient of sensitivity) and TCO(temperature coefficient of offset) compensation circuit was selected and easily done.The sensor is characterized with high accuracy and excellent reliability.This work demonstrates batch manufacture and operation of generic piezoresistive pressure sensor for high temperature. |
| Keywords: | SIMOX |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ | |