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| MBE方法在GaAs(001)衬底上外延生长GaSb膜 | |
| 引用本文： | 郝瑞亭,申兰先,邓书康,杨培志,涂洁磊,廖华,徐应强,牛智川. MBE方法在GaAs(001)衬底上外延生长GaSb膜[J]. 功能材料, 2010, 41(4) |
| 作者姓名： | 郝瑞亭 申兰先 邓书康 杨培志 涂洁磊 廖华 徐应强 牛智川 |
| 作者单位： | 1. 云南师范大学,太阳能研究所可再生能源材料先进技术与制备教育部重点实验室,云南,昆明,650092;中国科学院半导体研究所,超晶格国家重点实验室,北京,100083 2. 云南师范大学,太阳能研究所可再生能源材料先进技术与制备教育部重点实验室,云南,昆明,650092 3. 中国科学院半导体研究所,超晶格国家重点实验室,北京,100083 |
| 基金项目： | 国家自然科学基金资助项目(60607016,60625405);;国家重点基础研究发展计划(973计划)资助项目(2007CB936304);;云南省社会发展科技计划资助项目(2009CD045,2007E197M) |
| 摘 要： | 利用分子束外延方法(MBE)在GaAs(001)衬底上外延生长了GaSb薄膜,利用高分辨透射电子显微镜(HRTEM)、原子力显微镜(AFM)、Hall效应(HallEffect)和低温光荧光谱(LTPL)等手段对薄膜的晶体质量、电学性能和光学质量进行了研究。发现直接生长的GaSb膜表面平整,空穴迁移率较高。引入GaSb/AlSb超晶格可有效阻断进入GaSb外延层的穿通位错,对应的PL谱强度增强,材料的光学质量变好。 |
| 关 键 词： | GaSb GaAs 分子束外延（MBE） |
GaSb films grown by MBE on GaAs(001) substrates |
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| HAO Rui-ting,,SHEN Lan-xian,DENG Shu-kang,YANG Pei-zhi,TU Jie-lei,LIAO Hua,XU Ying-qiang,NIU Zhi-chuan. GaSb films grown by MBE on GaAs(001) substrates[J]. Journal of Functional Materials, 2010, 41(4) | |
| Authors: | HAO Rui-ting SHEN Lan-xian DENG Shu-kang YANG Pei-zhi TU Jie-lei LIAO Hua XU Ying-qiang NIU Zhi-chuan |
| Affiliation: | 1.Education Ministry Key Laboratory of Renewable Energy Advanced Materials and Manufacturing Technology;Institute of Solar Energy;Yunnan Normal University;Kunming 650092;China;2.State Key Laboratory for Superlattices and Microstructures;Institute of Semiconductors;Chinese Academyof Sciences;Beijing 100083;China |
| Abstract: | GaSb thin films were grown on GaAs(001) substrates by molecular beam epitaxy (MBE).The crystalline quality,electrical properties and optical properties were studied by high resolution transition electron microscopy (HRTEM),atomic force microscopy (AFM),Hall measurement and low temperature photoluminescence spectra (LTPL),respectively.It was found that the GaSb films directly grown on GaAs substrates have smooth surface and high hole mobility.It was also found that the AlSb/GaSb superlattices (SLs) can restr... |
| Keywords: | GaSb GaAs molecular beam epitaxy |
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