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Monoclinic B-phase erbium sesquioxide (Er2O3) thin films by filtered cathodic arc deposition |
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| Authors: | Christoph Adelhelm Thomas Pickert Martin Balden Marcin Rasinski Tomasz Plocinski Carlos Ziebert Freimut Koch Hans Maier |
| Affiliation: | aMax-Planck-Institut für Plasmaphysik, Materials Research, EURATOM Association, Boltzmannstraße 2, 85748 Garching, Germany;bFaculty of Materials Science and Engineering, Warsaw University of Technology, ul. Wołoska 141, 02-507 Warsaw, Poland;cForschungszentrum Karlsruhe, Institute for Materials Research I, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany |
| Abstract: | |
| Keywords: | Physical vapor deposition (PVD) Thin films Ceramics Oxides Texture |
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