Infrared scanning microscope with high spatial resolution |
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| Authors: | V. M. Bazovkin I. V. Mzhel’skii G. L. Kuryshev V. G. Polovinkin |
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| Affiliation: | 1.Rzhanov Institute of Semiconductor Physics, Siberian Branch,Russian Academy of Sciences,Novosibirsk,Russia |
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| Abstract: | Technical parameters and possible applications of an infrared scanning microscope with a spatial resolution of up to 3 μm are considered. It is shown that the device works with both array and linear photodetectors. Original PC software was designed to control the scanning process interactively and receive and process images of objects in the infrared range,. |
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