Carbon spheres generated in ‘dusty plasmas’ |
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| Authors: | GY Chen V Stolojan H Herman |
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| Affiliation: | a Advanced Technological Institute, Department of Electronic Engineering, University of Surrey, Guildford, Surrey, GU2 7XH, UK
b Advanced Technology Centre, Sowerby Building, BAE SYSTEMS, Filton FPC 267, Bristol BS34 7QW, UK |
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| Abstract: | The formation of spherical hydrogenated amorphous carbon (a-C:H) particulates generated in a radio frequency plasma enhanced chemical vapour deposition (rf-PECVD) system is reported. These particulates appear as a white powder—no other contaminants appear to be present. electron energy loss spectroscopy (EELS) shows characteristics typical of a-C:H with a reduced plasmon energy due to hydrogen incorporation. Raman spectroscopy however revealed a 1456 cm−1 line which was previously not reported on a-C:H films deposited using similar processes. Infrared (IR) spectroscopy shows that these spheres are mainly partially oxidised, methyl-rich, aliphatic hydrocarbons. |
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| Keywords: | B Plasma deposition C Raman spectroscopy |
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