分子泵的世纪回顾与展望

分子泵自1912年诞生以来，至今已快近一个世纪了，它在初期进展较缓慢，在1970年以前，分子泵的应用还仅限于核物理，电真空，表面科学等领域，但近20年来由于半导体产业的兴起和薄膜工业的发展，分子泵才被人们所重视，并得到了兴旺和发达，现代的分子泵已发展到实用和普及的阶段，本文回顾了分子泵分析近百年的发展历史，详细地介绍了分子泵在各个时期的发展状况，对初期的分子泵，涡轮分子泵，磁悬浮轴承和气体静压静轴式涡轮分子泵，复合式分子泵，低温型涡轮分子泵，新型牵引分子泵，陶瓷涡轮分子泵，轴反应生成物的涡轮分子泵和极高真空涡分子泵等做了重点的分析，最后指出分子泵的发展前景。

Review and prospects for acentury of molecular pump

Since the molecular pump was developed, it is nearly for a century. At the primary stage, it advanced slowly. Before 1970 its applications were in the fields of nuclear physics, electro vacuum, surface science etc. In the near 20 years, this pump is attached importance, due to the development of semi conductor, thin film industry. Now it was developed greatly, it is upto the practical and popular stage. In this paper, the history of the molecular pump is introduced; The conditions in the various stages of the pump are given in detail; On the primary molecular pump, turbomolecular pump, magnetic and gas static bearing type of turbomolecular pump, compound molecular pump, low temp. type of turbomolecular pump, new type of molecular drag pump, ceramic turbomolecular pump, turbomolecular pump to evacuate the reactant and EHV(Extreme High Vacuum) turbomolecular pump, the analyses are emphatically given. At late,the prospect of the pump is described.