| 锁相放大技术在等离子腐蚀监测过程中的应用 |
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| 引用本文： | 李明秋,张寒明. 锁相放大技术在等离子腐蚀监测过程中的应用[J]. 长春理工大学学报(自然科学版), 2001, 24(2): 36-38 |
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| 作者姓名： | 李明秋 张寒明 |
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| 作者单位： | 长春光学精密机械学院电子与信息工程分院(李明秋)，吉林省教育学院职教部(张寒明) |
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| 摘 要： | 本文介绍了锁相放大技术在等离子腐蚀过程中的应用 ,详细的论述了锁相放大器的设计过程 ,并对锁相放大器的性能进行了测试 ,结果表明 ,应用锁相放大技术进行终点监测过程中的弱信号提取 ,有效而可靠 ,提高了监测的灵敏度
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| 关 键 词： | 锁相放大器 开关电容滤波器 |
| 修稿时间： | 2001-02-16 |
The Application of Lock in Amplifer in Monitoring Process of Plasma Corrosion |
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| Li Mingqiu. The Application of Lock in Amplifer in Monitoring Process of Plasma Corrosion[J]. Journal of Changchun University of Science and Technology, 2001, 24(2): 36-38 |
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| Authors: | Li Mingqiu |
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| Affiliation: | College of Electronics and Information Engineering of Changchun Inst.Opt.and Fine Mech. |
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| Abstract: | The application of Lock in amplifer in monitoring process of plasma corrosion was recommended in this paper,and discussed the design of lock in amplifer.By the measurement of the nature of lock in amplifer prored the effectivity and reliablity of application of the lock in amplifer in weak signal extracting.It improved the sensitivity of montitoring. |
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| Keywords: | Lock in amplifer Derail capactiance filter |
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