| 非晶孵化层对高速生长微晶硅电池性能的影响 |
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| 引用本文： | 韩晓艳,张晓丹,侯国付,郭群超,袁育杰,董培,魏长春,孙建,薛俊明,赵颖,耿新华. 非晶孵化层对高速生长微晶硅电池性能的影响[J]. 太阳能学报, 2008, 29(8) |
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| 作者姓名： | 韩晓艳 张晓丹 侯国付 郭群超 袁育杰 董培 魏长春 孙建 薛俊明 赵颖 耿新华 |
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| 作者单位： | 南开大学光电子薄膜器件与技术研究所,光电信息技术科学教育部重点实验室,光电子薄膜器件与技术天津市重点实验室,天津,300071 |
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| 基金项目： | 国家重点基础研究发展计划(973计划)，国家自然科学基金，国家科技计划配套项目 |
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| 摘 要： | 采用高压高功率的甚高频等离子体增强化学气相沉积(VHF-PECVD)技术,以不同的反应气体总流量制备出沉积速率大于1nm/s、次带吸收系数(α0.8eV)小于2.5cm-1且具有相同晶化率的本征微晶硅薄膜,然而将其应用在微晶硅电池中时,电池性能却有明显差异.通过对微晶硅电池的光、暗态J-V,量子效率(QE)和微区拉曼(Raman)测试发现,微晶硅薄膜中非晶孵化层厚度的不同是引起电池性能差异的主要原因.反应气体总流量较低时沉积的微晶硅薄膜具有较厚的非晶孵化层,阻碍了载流子的输运,使电池的长波光谱响应下降,从而降低了电池的短路电流密度与填充因子;而增加总气体流量,有效减小了微晶硅薄膜中的非晶孵化层的厚度,从而使电池性能得到改善.最后在总气体流量为500sccm时,制备得到沉积速率为1nm/s,效率为7.3%的单结微晶硅太阳电池.
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| 关 键 词： | 高速沉积 非晶孵化层 微晶硅太阳电池 |
INFLUENCE OF AMORPHOUS SILICON INCUBATION LAYER ON THE CHARACTERS OF HIGH RATE DEPOSTED MICROCRYSTALLINE SILICON SOLAR CELLS |
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| Han Xiaoyan,Zhang Xiaodan,Hou Guofu,Guo Qunchao,Yuan Yujie,Dong Pei,Wei Changchun,Sun Jian,Xue Junming,Zhao Ying,Geng Xinhua. INFLUENCE OF AMORPHOUS SILICON INCUBATION LAYER ON THE CHARACTERS OF HIGH RATE DEPOSTED MICROCRYSTALLINE SILICON SOLAR CELLS[J]. Acta Energiae Solaris Sinica, 2008, 29(8) |
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| Authors: | Han Xiaoyan Zhang Xiaodan Hou Guofu Guo Qunchao Yuan Yujie Dong Pei Wei Changchun Sun Jian Xue Junming Zhao Ying Geng Xinhua |
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| Affiliation: | Han Xiaoyan Zhang Xiaodan Hou Guofu Guo Qunchao Yuan Yujie Dong Pei Wei Changchun Sun Jian Xue Junming Zhao Ying Geng Xinhua (Institute of Photoelectronics Thin Film Devices , Technique of Nankai University,Key Laboratory of Photoelectronice Thin Film Devices , Technique of Tianjin,Key Laboratory of Optoelectronic Information Science , Education,Tianjin 300071,China) |
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| Abstract: | A phenomenon was found in the high rate deposition process of microcrystalline silicon solar cells by very-high- frequency plasma-enhanced chemical vapor deposition(VHF-PECVD).The intrinsic microcrystalline silicon thin film with a deposition rate as high as 1.0nm/s and defect absorption(a_(0.8eV)is measured by CPM)as low as 2.5cm~(-1)can be obtained at different total gas flow rate.However,the J-V parameters of the solar cells which using the above intrinsic microcrystalline as their i-layers were obviousl... |
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| Keywords: | high rate deposition amorphous silicon incubation layer microcrystalline silicon solar cells |
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