首页 | 本学科首页   官方微博 | 高级检索  
     

离轴磁控溅射法生长1-3维PZT-NFO纳米复合薄膜
引用本文:张辉,马永军,王艺程,文丹丹,叶飞,白飞明.离轴磁控溅射法生长1-3维PZT-NFO纳米复合薄膜[J].无机材料学报,2014,29(4):371-376.
作者姓名:张辉  马永军  王艺程  文丹丹  叶飞  白飞明
作者单位:(1. 电子科技大学 电子薄膜与集成器件国家重点实验室, 成都 610054; 2. 包头市第二热电厂, 包头014030; 3. 大连理工大学 材料科学与工程学院, 大连 116024)
基金项目:国家重大基础研究资助项目(2012CB933104);国家自然科学基金(61271031);中央高校科研业务费资助项目(ZYGX2010X009)~~
摘    要:采用90°离轴磁控溅射法, 在MgAl2O4(001)单晶基片上自组装生长了Pb(Zr0.52Ti0.48)O3-NiFe2O4 (PZT-NFO)复合磁电薄膜, 并研究了基片温度、氩氧比和溅射功率等因素对薄膜结构和性能的影响。结果表明, 适合生长PZT-NFO薄膜的条件为基片温度800℃, 氩氧比1:1, 溅射功率160 W。XRD测试显示, PZT-NFO薄膜为外延生长薄膜, 且PZT相与NFO相之间的垂直晶格失配非常小。AFM和SEM结构观察表明, 薄膜具有清晰的1-3维纳米复合结构, 铁磁相NFO纳米柱直径约为80~150 nm。降低氩氧比有助于NFO相的形成, 但溅射功率过大会造成1-3维结构向无规则0-3维结构转变。磁性能测量表明纳米复合薄膜的饱和磁化强度在120~160 kA/m之间, 低于块体的NFO相, 可能是由于两相的界面扩散所造成。

关 键 词:纳米复合  磁电效应  磁控溅射  自组装  
收稿时间:2013-07-16
修稿时间:2013-10-11

Preparation of 1-3 Dimensional PZT-NFO Nanocomposite Films by Off-axis Magnetron Sputtering
ZHANG Hui,MA Yong-Jun,WANG Yi-Cheng,WEN Dan-Dan,YE Fei,BAI Fei-Ming.Preparation of 1-3 Dimensional PZT-NFO Nanocomposite Films by Off-axis Magnetron Sputtering[J].Journal of Inorganic Materials,2014,29(4):371-376.
Authors:ZHANG Hui  MA Yong-Jun  WANG Yi-Cheng  WEN Dan-Dan  YE Fei  BAI Fei-Ming
Affiliation:(1. State Key Laboratory of Electronic Thin Film and Integrated Devices, University of Electronic Science and Technology, Chengdu 610054, China; 2. The Second Cogeneration Power Plant, Baotou 014030, China; 3. School of Materials Science and Engineering, Dalian University of Technology, Dalian 116024, China)
Abstract:Self-assembled nanocomposite Pb(Zr0.52Ti0.48)O3-NiFe2O4 films were prepared on the (001)-oriented MgAl2O4 substrates by a 90° off-axis magnetron sputtering method. The influences of substrate temperature, argon over oxygen ratio and sputtering power on the structure and properties of PZT-NFO nanocomposite films were studied. The optimal growth conditions are substrate temperature of 800 ℃, argon over oxygen ratio of 1:1 and sputtering power of 160 W. XRD studies reveal that the PZT-NFO film is epitaxial along both the in-plane and out-of-plane directions, and the vertical lattice mismatch between the PZT phase and the NFO phase is very small. AFM and SEM analysis show that the PZT-NFO films have clear 1-3 dimensional nanocomposite structure, and the diameter of NFO nanorods is 80-150 nm. Further decreasing argon over oxygen ratio is beneficial for the formation of NFO. However, increasing RF power causes a transition from an 1-3 dimensional nanocomposite to a 0-3 dimensional chaotic structure. Magnetic measurement shows that the saturation magnetization of NFO phase is 120-160 kA/m, lower than that of bulk NFO phase, possibly due to the interfacial diffusion between the NFO and the PZT phases.
Keywords:nanocomposite  magnetoelectric effect  magnetron sputtering  self-assembly  
本文献已被 CNKI 等数据库收录!
点击此处可从《无机材料学报》浏览原始摘要信息
点击此处可从《无机材料学报》下载全文
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号