基于五棱镜扫描技术测试大口径平面镜的系统设计

根据五棱镜扫描测试技术建立了大口径平面镜面形测试系统.对测试系统结构的设计与组成进行了阐述,分析了在实现大口径轮廓扫描时,主要影响测试精度的因素和影响形式;通过计算给出了五棱镜制造误差与扫描机构导向误差对角度测试的综合影响趋势,得出了轮廓测试过程中法线角度改变量测试误差主要受导轨精度影响的结论.在导轨导向精度设计为俯仰与偏摆角10″、滚动偏角20″时,系统测试光线角度变化量在扫描方向上最大为0.000 969 694″,可满足测试要求(系统测角精度为0.02″).通过计算机模拟,进行了多条带区域轮廓图拼接实验,与干涉图比对,验证了该系统的可行性.

System design of large flat mirror measurement based on pentagon prism scanning technique

The test system of large flat mirror based on pentagon prism scanning technique is presented.Its structure and working principle are introduced.Main factor as well as its form that affect the testing precise in the process of large profile scanning is discussed.The synthesized influence for angle testing caused by manufacturing error and scanning institution directing error are calculated,by which the conclusion of that the normal angle variation testing error are mainly affected by the rail accuracy in the process of profile testing could be made.The maximum error of angle variation is 0.000 969 694 arcsec in scanning direction when the errors of rail in pitch and yaw are 10 arcsec and 20 arcsec in roll,which meets the accuracy requirement of the system.By computer simulating,a set of stitched profile map was accomplished which verifies the feasibility of the system.