环抛机直驱电机转台系统设计

针对光电子基片超精密抛光对抛光机盘面转台的低速稳定运转要求,提出了采用无框直驱电机直接驱动液体静压转台旋转、圆光栅反馈转速、运动控制卡进行闭环控制的解决方案。基于Lab-VIEW程序和研华API通用运动架构设计人机交互控制系统,通过电流环、速度环和位置环搭建的三闭环控制系统由内而外逐步推导出传递函数,建立了转台运动控制系统的数学模型。使用Mat-lab内嵌的Simulink模块进行仿真分析,结果表明,所设计的环抛机直驱电机转台系统速度波动范围在1%以下且运行平稳,可满足光电子基片超精密抛光的要求。

Design of Direct-drive Motor System on the Rotary Table of Continuous Polisher

In accordance to the requirement of stable and low speed rotation of the polishing disk on a large-scale continuous polisher in the ultra-precision polishing of photoelectron chips,a solution is presented which consists of direct-drive permanent magnet synchronous motor for the hydrostatic rotary table,circular grating for velocity feedback and motion card for close-loop control.A human-machine-interaction(HMI)system based on LabVIEW program and Advantech application programming interface(API)is compiled.By adopting three-loop control system which comprises current loop,speed loop and position loop,mathematical models of direct-drive motor control system installed on a large-scale continuous polisher are established,and it deduces transfer function gradually from inside to outside.The simulatuion results on the Simulink module of Matlab reflect that the direct-drive motor system of continuous polisher provides steady velocity fluctuation within 1%,which should perfectly meet the needs of ultra-precision polishing of photoelectron chips.