Unit for automatic calibration of gas flow rate controllers |
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| Authors: | S. G. Baidakov B. Yu. Grishin V. V. Komarov A. N. Kostin A. I. Mashin |
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| Affiliation: | (1) Keldysh Research Center, Moscow, Russia |
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| Abstract: | A unit is described for automatic calibration of gas flow controllers, within which there is a reference flowmeter device ERU-0.5, making it possible to measure gas working medium flow rates of 0.01–0.5 cm3/sec with a total error of ± (0.3–0.7)%. The operating principle of the construction, a procedure for determining gas mass flow rate, the main parameters of the flow rate device, and measurement errors are considered. |
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