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量子点的原子力显微镜测试结果分析:数学形态学的实现
引用本文:金峰,鲁华祥,李 凯,陈涌海,王占国.量子点的原子力显微镜测试结果分析:数学形态学的实现[J].半导体学报,2005,26(11):2120-2126.
作者姓名:金峰  鲁华祥  李 凯  陈涌海  王占国
作者单位:中国科学院半导体研究所 神经网络实验室,北京 100083;中国科学院半导体研究所 神经网络实验室,北京 100083;中国科学院半导体研究所 神经网络实验室,北京 100083;中国科学院半导体研究所 材料开放实验室,北京 100083;中国科学院半导体研究所 材料开放实验室,北京 100083
基金项目:中国科学院资助项目 , 科技部科研项目
摘    要:提出了从原子力显微镜(AFM)照片中分割出量子点的算法,可以利用程序自动地统计照片中量子点的各种数据.该算法基于数学形态学的方法,包括三个步骤:首先根据照片中每个局部最高点的dynamics值,利用标记分水岭分割方法初步将每个量子点分开;第二步根据量子点的定义,从每个区域中提取出量子点;第三步,为了防止分割过程中将部分衬底一起提取,利用量子点的高度-面积分布,将多余衬底滤去.该算法具有快速、对噪声不敏感的特点,能准确地提取量子点的高度、横向尺寸、体积等数据.

关 键 词:数学形态学  分水岭变换  量子点检测  自动统计  量子点  原子力  显微镜  测试  结果分析  数学形态学  Quantum  Dots  Measure  Algorithm  Based  Morphology  体积  尺寸  敏感  噪声  快速  分布  面积  高度  过程
文章编号:0253-4177(2005)11-2120-07
收稿时间:2005-04-25
修稿时间:2005-06-08

Mathematical Morphology Based Algorithm to Measure Quantum Dots from AFM Photos
Jin Feng,Lu Huaxiang,Li Kai,Chen Yonghai and Wang Zhanguo.Mathematical Morphology Based Algorithm to Measure Quantum Dots from AFM Photos[J].Chinese Journal of Semiconductors,2005,26(11):2120-2126.
Authors:Jin Feng  Lu Huaxiang  Li Kai  Chen Yonghai and Wang Zhanguo
Affiliation:Artificial Neural Networks Laboratory,Institute of Semiconductors,Chinese Academy of Science,Beijing 100083,China;Artificial Neural Networks Laboratory,Institute of Semiconductors,Chinese Academy of Science,Beijing 100083,China;Artificial Neural Networks Laboratory,Institute of Semiconductors,Chinese Academy of Science,Beijing 100083,China;Key Laboratory of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;Key Laboratory of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China
Abstract:This paper proposes an algorithm to obtain the statistic data of quantum dots from atomic force microscopy photos.Starting from identifying the dynamic values of each regional maximum,the peak of each qualified quantum dot is located.Their positions are used as the markers for the next step, which is to apply the marker watershed transform to obtain a rough segmentation of the quantum dots.According to the boundary of the coarse partition,each quantum dot is cut from the original photo.A process is then carried out to filter the possible attached substrates based on the area-height distribution of the current quantum dot.After all the above stages,all the quantum dots can be accurately and robustly extracted and thus their properties, such as height,lateral size,and volume,can easily be measured.
Keywords:mathematical morphology  watershed transform  quantum dots characterization  automatic statistics
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