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真空退火Fe/Pt多层膜的结构和磁性
引用本文:李宝河,黄阀,杨涛,翟中海,朱逢吾. 真空退火Fe/Pt多层膜的结构和磁性[J]. 半导体学报, 2005, 26(13): 32-35
作者姓名:李宝河  黄阀  杨涛  翟中海  朱逢吾
作者单位:北京科技大学材料物理与化学系,北京 100083;北京工商大学数理部,北京 100037;北京科技大学材料物理与化学系,北京 100083;北京科技大学材料物理与化学系,北京 100083;北京科技大学材料物理与化学系,北京 100083;北京科技大学材料物理与化学系,北京 100083;金日成综合大学物理系,平壤 朝鲜
摘    要:采用直流磁控溅射方法制备了Fe/Pt多层膜和FePt单层薄膜,并在不同温度下真空热处理得到了有序相L10-FePt薄膜. 研究表明,Fe/Pt多层膜化可以降低FePt薄膜有序相的转变温度.[Fe(1.5nm)/Pt(1.5nm)13薄膜在350℃热处理后,有序度已经增加到0.6,而且矫顽力达到了501kA/m. 多层膜化促进有序化在较低的温度下进行,这主要是因为原子在多层膜界面扩散更快.

关 键 词:L10-FePt有序相;磁控溅射;有序度;Fe/Pt多层膜

Structure and Magnetic Properties of Vacuum Annealed Fe/Pt Multilayers
Li Baohe,Hwang Pol,Yang Tao,Zhai Zhonghai and Zhu Fengwu. Structure and Magnetic Properties of Vacuum Annealed Fe/Pt Multilayers[J]. Chinese Journal of Semiconductors, 2005, 26(13): 32-35
Authors:Li Baohe  Hwang Pol  Yang Tao  Zhai Zhonghai  Zhu Fengwu
Affiliation:Department of Material Physics and Chemistry,University of Science and Technology Beijing,Beijing 100083, China;Department of Mathmatics and Physics,Beijing Technology and Business University,Beijing 100037, China;Department of Material Physics and Chemistry,University of Science and Technology Beijing,Beijing 100083, China;Department of Physics,Kim Il Sung University,Pyongyang,DPRK;Department of Material Physics and Chemistry,University of Science and Technology Beijing,Beijing 100083, China;Department of Material Physics and Chemistry,University of Science and Technology Beijing,Beijing 100083, China;Department of Material Physics and Chemistry,University of Science and Technology Beijing,Beijing 100083, China
Abstract:
Keywords:L10-FePt order phase  magnetron sputtering  ordering parameter  Fe/Pt multilayer
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