Fabrication of nanostructures with different iron concentration by electron beam induced deposition with a mixture gas of iron carbonyl and ferrocene, and their magnetic properties |
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| Authors: | M Takeguchi M Shimojo K Mitsuishi M Tanaka R Che K Furuya |
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| Affiliation: | (1) High Voltage Electron Microscopy Station, National Institute for Materials Science, 3-13 Sakura, Tsukuba 305-0003, Japan;(2) Advanced Science Research Laboratory, Saitama Institute of Technology, 1690 Fusaiji, Okabe-machi Saitama, 369-0293, Japan |
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| Abstract: | Electron beam induced deposition (EBID) with a mixture gas of iron carbonyl and ferrocene was carried out to fabricate nanostructures with different iron concentrations in a chamber of a scanning electron microscope. The iron concentration was controlled by changing the ratio of partial pressure of iron carbonyl and ferrocene. Electron holography observation revealed that the remanent magnetic flux density B
r values of the nanostructures were also changed depending on the iron concentration. |
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