开口同轴探头去嵌入技术的研究

开口同轴探头测量技术，由于可实现非破坏性测试，一直是众多科学家及工程技术人员关注的焦点。但对于同轴探头的误差分析，研究不够深入。相位补偿技术是最常用的同轴探头去嵌入技术，该技术假设同轴探头是理想器件，忽略了同轴探头加工精度带来的误差。为此，提出了一种更为精确的去嵌入技术，即基于传输线模型的开口同轴探头去嵌入技术，通过实测得到表征同轴探头误差的校准参量，从而量化同轴探头的误差模型，以去除在测量中同轴探头带来的误差。介绍了该技术的基本原理，并与相位补偿技术进行了对比，最终通过实测验证了该技术是有效可行的。

Research on the open-ended coaxial probe's de-embedding

The open coaxial probe measurement technique has always been the focus of scientists and engineers, for it can conduct con-destructive tests. However, research on error analysis of the coaxial probe is still not thorough. The phase compensation technology is the mostly used coaxial probe de-embedding technology, which assumes that the coax- ial probe is an ideal device without considering the errors brought about by machining precision of the coaxial probe. This paper proposed a more precise de-embedding technology, which is based on the transmission line model, i.e. the open-ended coaxial probe de-embedding technique. The calibration parameter can be gained through actual measurement of errors of the characterization coaxial probe, thus leading to the quantization of the error model of the coaxial probe. As a result, errors brought by the coaxial probe in the process of measurement can be eliminated. This paper has made a de- tailed introduction to the basic theory of this technique, compared it with the phase compensation technology, and proved that this technique is effective and feasible.