Evaluation of residual stresses in PVD-coatings. Part 2

The values of residual stresses in PVD-coatings of titanium, aluminum and niobium nitrides are determined by the flexible specimen method. An experimental-and-calculation procedure for separating the structural and thermal components of residual stresses is proposed that allows one to determine the thermal expansion coefficients of the coating materials and a general level of residual stresses in coatings on a substrate of any material. The dependence of the residual stress on the roughness of the substrate surface is established. The possibility of adjusting the level of residual stresses in coatings by the discrete surface topography formation is shown.