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基于Silicate-1型分子筛修饰的QCM类神经毒气传感器
引用本文:彭晶,姚伟,纪新民,胡元元,刘全,包宗明,黄宜平.基于Silicate-1型分子筛修饰的QCM类神经毒气传感器[J].传感技术学报,2011,24(3):317-320.
作者姓名:彭晶  姚伟  纪新民  胡元元  刘全  包宗明  黄宜平
作者单位:彭晶,姚伟,纪新明,刘全,包宗明,黄宜平,PENG Jing,YAO Wei,JI Xinmin,LIU Quan,BAO Zongming,HUANG Yiping(复旦大学专用集成电路及系统国家重点实验室,微电子学系,上海,200433);胡元元,HU Yuanyuan(复旦大学化学系,上海,200433)
摘    要:主要研究Silicate-1型纳米分子筛对类神经毒气有机气体甲基磷酸二甲酯(DMMP)的敏感特性,并结合高灵敏度的石英谐振天平(QCM)研制了DMMP气体传感器.采用Silicate-1型纳米分子筛作为敏感膜材料分别对不同浓度的DMMP气体进行检测.QCM传感器随着气体浓度的增加,响应时间增加,气体吸附量增加;当DMM...

关 键 词:气敏传感器  Silicate-1分子筛  QCM  DMMP

QCM Gas Sensor Based on Modified Silicate-1 Zeolite for the Nerve Agent Simulant DMMP Detection
PENG Jing,YAO Wei,JI Xinmin,HU Yuanyuan,LIU Quan,BAO Zongming,HUANG Yiping.QCM Gas Sensor Based on Modified Silicate-1 Zeolite for the Nerve Agent Simulant DMMP Detection[J].Journal of Transduction Technology,2011,24(3):317-320.
Authors:PENG Jing  YAO Wei  JI Xinmin  HU Yuanyuan  LIU Quan  BAO Zongming  HUANG Yiping
Affiliation:PENG Jing1,YAO Wei1,JI Xinmin1,HU Yuanyuan2,LIU Quan1,BAO Zongming1,HUANG Yiping1 1.Department of Microelectronics,ASIC and System National Key Laboratory,Fudan University,Shanghai 200433,China,2.Department of Chemistry
Abstract:A new quartz crystal microbalance(QCM)gas sensor based on the silicate-1 zeolite film is introduced.The sensitive characteristics to the nerveagent sarin stimulant dimethylmethylphosphonate(DMMP)of the gas sensor have been systematically studied.Different concentration DMMP are detected by the sensor.As the concentration of DMMP increases,the respone time increases,and the absorbed capability of QCMsensor increases.The delta frequency of QCMis 50 Hz to 50×10-6 DMMP.In order to test the selectivity of the gas sensor,water vapor,300×10-6 CO2 and 500×10-6 NH3 are used as interfering gases.The delta frequencies of QCMto these gases are 178 Hz,28 Hz and 15 Hz.In 60 seconds the gas sensor obtained 85% desorption ratio by alternating field with 99.999% N2 blow-washing in this experiment.
Keywords:QCM  DMMP
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