| 具有环境温度自补偿功能的微湿度传感器设计 |
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| 引用本文： | 于进,马锓,张洪泉.具有环境温度自补偿功能的微湿度传感器设计[J].传感器与微系统,2009,28(10):70-72. |
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| 作者姓名： | 于进 马锓 张洪泉 |
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| 作者单位： | 于进(国防科工局军工项目审核中心,北京,100081);马锓,张洪泉(哈尔滨工程大学,黑龙江,哈尔滨,150001) |
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| 摘 要： | 设计了基于微加工技术的微湿度传感器，介绍了湿度传感器基于差分电路原理的温度补偿方法，实验证明：制作的湿度传感器具有半对数线性，环境温度为10-40℃时，湿度传感器输出变化小于±4％RH。
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| 关 键 词： | 温度 湿度 传感器 补偿 |
Design of microhumidity sensor with environmental temperature self-compensation function |
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| Affiliation: | YU Jin, MA Qin, ZHANG Hong-quan (1. Audit Center of Military Project of National Defense Science and Industry Bureau, Beijing 100081, China; 2. Harbin Engineering University, Harbin 150001, China) |
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| Abstract: | The microhumidity sensor are designed based on micro-machining technology . A temperature compensation method of the humidity sensors based on differential circuit is introduced. Experiments show that the humidity sensor has semi-logarithmic linearity. The output of humidity sensors is less than ±4 % RH when environmetal temperature is 10～40℃. |
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| Keywords: | temperature humidity sensor compensation |
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